Scanning Tunneling Microscopy and Lithography of Solid Surfaces Covered with Non-Polar Liquids.
Abstract
Atomic resolution tunneling microscopy can be done under nonpolar liquids. Two possible areas of application are explored: lithography and imaging air sensitive materials. The lithography was demonstrated by writing a 20 A x 40 A wide and 20 A deep hole onto a gold surface. The imaging of air sensitive materials was demonstrated by imaging Gallium Arsenide.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 19, 1987
- Accession Number
- ADA182509
Entities
People
- J. Schneir
- Paul K. Hansma
Organizations
- University of California, Santa Barbara