Research in Traveling Wave Charge Transport Technology
Abstract
This final report describes progress in three fundamental tasks directed toward the development of traveling wave charge transport technology. (1) Device Physics and Modeling, including theory of charge injection into a traveling wave, study of nondestructive sensing or charge, and study of potential distributions in traveling wave devices. (2) Fabrication Technology Research, including of dielectric for low temperature processing, development of photolithographic methods for ion-implanted thick active layers, and study of leakage current in GaAs Schottky barriers. GaAs Surface Acoustic Wave Research, including development of waveguide structures of high intensity surface acoustic waves (SAW), and study of SAW propagation in GaAs.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 1987
- Accession Number
- ADA182767
Entities
People
- B. C. Schmukler
- B. J. Hunsinger
- C. E. Warren
- E. G. Bogus
- M. J. Hoskins
Organizations
- University of Illinois Urbana–Champaign