Laser Processing of High-Tech Materials at High Irradiance.
Abstract
The major applications of lasers to the processing of high technology materials are briefly enumerated. It is found that the majority of these applications rely upon the direct thermal effects of irradiating the material with laser light. Several other important interactions of high irradiance lasers with materials are examined. The need for survey and evaluation of the capabilities of lasers to generate shocks for materials processing is underscored. Emphasis is placed on applications and potential applications of secondary processing, in which the particle or phonon emissions of a laser-produced plasma are employed in the materials processing steps. The demonstrated feasibility of using x-ray pulses from laser-produced plasmas for x-ray lithographic fabrication of microelectronics and microstructures is briefly reviewed. The possible application of laser evaporative desposition to the fabrication of novel materials, such as multilayers, superlattices, quantum devices microstructures, is proposed. Keywords: Laser, Laser processing, Shock, High irradiance, X-ray lithography, Laser plasma, Evaporation, Deposition, Shock driver, Shock pressure, Flyer plate.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 13, 1987
- Accession Number
- ADA183022
Entities
People
- Robert R. Whitlock
Organizations
- United States Naval Research Laboratory