Resist Rolymers. 8. Thermolysis of Bromine Containing Acrylate Polymers.
Abstract
Thermal decomposition of synthetic polymer can exclude its usage in certain applications. It is often found that the thermal decomposition of polymer can differ significantly from those of model compounds because the chain environment may modify reaction pathways. The thermolysis of bromine containing polymers is particularly interesting because of their role as proven flame retardants. The bromine containing polymers behave differently from the fluorine and chlorine analogs toward energetic radiation as possible candidates for positive electron beam resists. The radiolysis of bromine derivatives have marked tendency toward crosslinking, whereas fluorine containing polymers undergo only main chain scission. Thermal stabilities of these polymers are also important in this application because the requirements to withstand various heat treatment during the manufacturing of VLSI devices. Recently Grassie et al. reported the thermal degradation of poly (2-bromoethyl methacrylate), PBEMA, and blends of PBEMA and poly(methyl acrylate) producing mainly monomer with small amounts of vinyl bromide and carbon dioxide. The central objective of this work is to identify the pyrolysis products of three bromine containing acrylate polymers and their copolymers with MMA and to understand the mechanism of thermal decomposition as compared to that for radiolysis. A further objective is to understand the differences between the thermolysis of bromine and fluorine containing polymers.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1987
- Accession Number
- ADA183135
Entities
People
- G. N. Babu
- James C. Chien
- Pradeep K. Dhal
Organizations
- University of Massachusetts Amherst