Choosing Polymer Solvents for Microlithography.
Abstract
Criteria for choosing solvents for coatings and dissolution processes in microlithography include: a) Thermodynamic interaction measured by viscosity level, intrinsic viscosity, or swelling, b) Dynamic interaction (transport) characterized by a diffusivity or some other rate process, such as rate of dissolution, c) Volatility, control of removal, since the solvent is not a part of the final product, d) Safety (flammability and health hazards), and e) Cost. Solvents based on ethylene oxide derivatives which contain both ether and ester linkages have been very useful in lithographic applications. However, health hazards such as fetatoxicity may be involved with such materials. In this work we found that PMAC (1-methoxy-2 propanol, acetate) and EEP (ethyl 3-ethoxy propionate) are suitable replacements for two popular ethylene oxide-based solvents, namely, MCA (2-methoxyethyl acetate) and ECA (2-ethoxyethyl acetate).
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 24, 1987
- Accession Number
- ADA183279
Entities
People
- D. Rosenthal
- Francisco J. Medellı́n-Rodrı́guez
- R. J. Groele
- S. K. Obendorf
- Y. M. Namaste
Organizations
- Cornell University School of Chemical and Biomolecular Engineering