Chemical Reactions at the in vacuo Au/InP Interface.

Abstract

The reaction between a gold film and an indium phosphide substrate occurs much more readily in vacuo than under an atmosphere pressure of an inert gas. At high pressures, the compounds Au2P3 and the Y intermetallic compound (at times designated Au7In3, Au9In4, or Au2In) are formed at 450 C and remain fairly stable even when annealed at 500 C for hours. Under ultra-high vacuum conditions, phosphorus readily escapes from the film when a sample is annealed at 300 C for 15 minutes, and the major reaction products are the psi phase (Au3In2) and an unidentified Au-InP behaves more like a closed thermodynamic system under pressure than in a vacuum. Keywords: Phosphorus escape, Composition shift, Layered islands, Four solid phases, Ternary phase diagram, Intense reflections.

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Document Details

Document Type
Technical Report
Publication Date
Jul 25, 1987
Accession Number
ADA183839

Entities

People

  • C. T. Tsai
  • Eun-hee Cirlin
  • R. Stanley Williams

Organizations

  • University of California, Los Angeles

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms

DTIC Thesaurus Topics

  • Availability
  • Barometric Pressure
  • California
  • Chemical Reactions
  • Chemistry
  • Classification
  • Contracts
  • Diagrams
  • Elements
  • Films
  • Governments
  • Intermetallic Compounds
  • Military Research
  • Phase Diagrams
  • Solid Phases
  • Thin Films
  • Universities

Readers

  • Combustion science or combustion engineering.
  • Thin Film Deposition Science.