The Production of Ultrasmall and Superfine Holographic Diffraction Gratings Using Synchrotron Radiation and Lithographic Techniques.
Abstract
The research effort was directed toward the production of superfine X-ray gratings by holographic means, i.e. generating an interference pattern by X-rays emitted in the form of synchrotron radiation from a high energy electron storage ring, recording the pattern on a resist, such as PMMA, and subsequently transferring it onto metal.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 1987
- Accession Number
- ADA185395
Entities
People
- Paul L. Csonka
Organizations
- University of Oregon