Synthesis and Characterization of Thin Films.

Abstract

This report summarizes a program which involved the installation of the individual systems of a major thin film facility and the results of initial film growth studies using the facility. Work in the growth of aluminum and germanium on silicon, germanium on gallium arsenide, and lithium niobate on silicon and sapphire is reported. Keywords: Thin films, Depositions, Ionized cluster beam deposition; LiNbO3 films, Ellipsometry.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jul 10, 1987
Accession Number
ADA187335

Entities

People

  • K. M. Lakin

Organizations

  • Iowa State University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Synthesis
  • Chemistry
  • Computer Programs
  • Crystal Lattices
  • Crystal Structure
  • Crystals
  • Electromagnetic Fields
  • Heat Energy
  • Mass Spectrometry
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Measurement
  • Piezoceramics
  • Piezoelectric Effect
  • Piezoelectric Materials
  • Refractive Index

Fields of Study

  • Physics

Readers

  • Optical Physics and Photonics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene