Synthesis and Characterization of Thin Films.
Abstract
This report summarizes a program which involved the installation of the individual systems of a major thin film facility and the results of initial film growth studies using the facility. Work in the growth of aluminum and germanium on silicon, germanium on gallium arsenide, and lithium niobate on silicon and sapphire is reported. Keywords: Thin films, Depositions, Ionized cluster beam deposition; LiNbO3 films, Ellipsometry.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 10, 1987
- Accession Number
- ADA187335
Entities
People
- K. M. Lakin
Organizations
- Iowa State University