Chemical Cleaning of Metal Surfaces in Vacuum Systems by Exposure to Reactive Gases.
Abstract
Chemical surface cleaning procedures for metals using oxidation/reduction cycles by exposure to oxidizing (oxygen, nitric oxide) and reducing (Hydrogen, Ammonia) gases are summarized and are briefly discussed for iron, nickel, palladium, copper and silver surfaces. We also present data on the reduction of gaseous contaminants in a stainless steel UHV system by flowing nitric oxide through the system during bake-out Keywords: Vacuum chambers.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 10, 1987
- Accession Number
- ADA188588
Entities
People
- H. Ruppender
- M. Grunze
- O. Elshazly
Organizations
- University of Maine