Autonomous Control System for Czochralski Growth of LEC GaAs

Abstract

This program reports research done under DARPA contract number F49620-86-C-0012. The goals of this program include the establishment of autonomous LEC crystal growth and its commercialization. This report provides a short description of the autonomous control system, a detailed description of the digital hardware developed for the control system and the multibus computer system and the computer-puller hardware of the growth system. Technical drawings for the signal processing box and the motor controller board are also given. During the first period (1 year) this system has grown 30 single GaAs crystals with a yield of better than 70% of single crystals. Keywords: Autonomous crystal growth, Expert control system, Gallium arsenides.

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Document Details

Document Type
Technical Report
Publication Date
Dec 29, 1987
Accession Number
ADA189726

Entities

People

  • G. H. Schwuttke
  • Karl Riedling
  • Robert C. White

Organizations

  • Arizona State University

Tags

Communities of Interest

  • Autonomy

DTIC Thesaurus Topics

  • Abstracts
  • Air Force
  • Analog Signals
  • Computers
  • Consoles
  • Contracts
  • Control Systems
  • Crucibles
  • Crystal Growth
  • Crystals
  • Diagrams
  • Gallium Arsenides
  • Materials
  • Materials Laboratories
  • Signal Processing
  • Single Crystals
  • Universities

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Semiconductor Device Technology
  • Unmanned Aerial System (UAS) Autonomous Capabilities and Mission Reconnaissance.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems