Ion Implantation Manufacturing Technology Project.
Abstract
The objective of the NRL MANTECH Program was to design, build, and operate a high-throughput ion implantation facility. This facility is to be used to demonstrate the transfer of implantation technology to industrial pilot production conditions. The program consisted of three phases, each intended to involve one year of effort. The first involved design of a vacuum end station with compatible high-throughput workpiece-handling fixtures. Phase 2 consisted of fabrication of this hardware, together with development tests to define implantation conditions for WC tooling. The last phase was to merge a government-funded implanter with the Spire-developed hardware and operate the system as a pilot production facility for the implantation of various Navy bearings for corrosion resistance. This final report covers all phases of the program, including beam system design, target manipulation, system performance, and cost analyses based on actual/future design concepts.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1987
- Accession Number
- ADA190487