Nondestructive Moisture Measurement in Microelectronics.

Abstract

This project was aimed at understanding moisture induced effects on materials used in microelectronic device manufacture. The approach chosen has been the use of state-of-the-art interdigitated surface conductivity test structures for characterizing the responses of microelectronic materials to ambient and condensed moisture, by performing nondestructive moisture measurements on both hermetically sealed and delidded packages. A test chamber and an appropriate electrical test setup have been developed for assessing the specificity, reproducibility and sensitivity of these effects. Keywords: Moisture, Surface conductivity sensor, Nondestructive measurements, Adsorption physical models.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1987
Accession Number
ADA190515

Entities

People

  • Didier Kane
  • Henry Domingos

Organizations

  • Clarkson University

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Accuracy
  • Aluminum Oxides
  • Crystal Structure
  • Dew Point
  • Diagrams
  • Failure Mode And Effect Analysis
  • Gas Laws
  • Heat Energy
  • Ideal Gas Law
  • Measurement
  • Partial Pressure
  • Phase Diagrams
  • Phase Transformations
  • Reliability
  • Specific Heat
  • Vapor Pressure
  • Water Vapor

Readers

  • Electronics Engineering
  • Nanoscale Plasmonic Nanotechnology
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems