UV-Laser Reactions of Molecular Adsorbates.
Abstract
A technique has been developed for determining the surface diffusivity of a weakly bound adsorbate. Electron-beam-induced changes in the structure of partially amorphous CdS surfaces have been observed directly with atomic resolution. The interaction between a visible laser beam and compound semiconductors was studied; a dynamic light-guiding effect which leads to the formation of single mode slab waveguides was identified. Thin films and single crystals of metal oxides were deposited by laser-induced photochemical reactions in gas-phase and adsorbed molecules. A surface halogenation techniques was developed for the photochemical etching of refractory metal films and was applied to in situ tuning of millimeter wave circuits. Laser-induced deposition of high purity tungsten was demonstrated and was applied to multi-level metallization and restructing of circuits. Keywords: Lasers , Photochemistry, Surface reactions, Adsorbates, Etching, Metals, Semiconductors.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 27, 1987
- Accession Number
- ADA190796
Entities
People
- D. J. Ehrlich
- M. Rothschild
Organizations
- Massachusetts Institute of Technology