Enhanced Backscattering from Rough Surfaces.
Abstract
Further photoresist surfaces have been prepared, but are not yet fully characterized by Talysurf and optical microscopy. Results of infra-red (10.6 microns) scattering for I sub ss, I sub sp, I sub pp and I sub ps from one of these surfaces are given overleaf. This is the first really conclusive piece of evidence that we are getting significantly different behaviour for s and p incident polarizations. Curves are given for angles of incidence of 0 and 30 deg. Note the tendency of the cross-polarized return to maximize towards backscatter and the quite different shapes of the I sub ss and I sub pp curves at 30 deg angle of incidence. Although the rms surface height (approx 1 micron) is very much less than one wavelength, the Rayleigh parameter R = (4 pi sigma sub h)/lambda is not small in the perturbation sense.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 09, 1987
- Accession Number
- ADA191089
Entities
People
- J. C. Dainty
Organizations
- Imperial College London