Thin Film Research Diagnostics Instrumentation.
Abstract
All equipment purchased under this contract has been used for deposition and analysis of thin films. In particular, the Ar-ion laser is being used to investigate film scatter at multiple wavelengths. The excimer laser is being used to enhance deposition mechanisms; it illuminates a coated surface throughout film disposition. The microscope and ellipsometer are part of diagnostics used to analyze films.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 21, 1987
- Accession Number
- ADA191240
Entities
People
- Mcneil
Organizations
- University of New Mexico