Thomson Scattering for Determining Electron Concentrations and Temperatures in an Inductively Coupled Plasma. 1. Assessment of the Technique for a Lo -Flow, Low-Power Plasma.
Abstract
Electron number densities and electron temperatures have been measured by multichannel Thomson scattering in a low-flow low-power inductively coupled plasma. Preliminary electron-concentration values agree well with those previously determined, and spatial variation in both electron concentration and temperature are largely consistent with existing models of the ICP. One difference is that aqueous aerosol was found here to depress the electron number density throughout the plasma. Unfortunately, the intensities measured in the wings of the Thomson-scattering spectrum large uncertainties, making data analysis difficult and the measured electron temperatures less reliable than desired.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 15, 1988
- Accession Number
- ADA191323
Entities
People
- Gary M. Hieftie
- Kim A. Marshall
Organizations
- Indiana University