Laser-Assisted Chemical Reactions of Organometallic Complexes at Surfaces.
Abstract
The objectives of this research program are to investigate laser-assisted chemical reactions involving organometallic complexes for deposition of electronic materials at low temperatures. Specific areas of investigation are to (1) elucidate the kinetics and mechanisms of the photophysical and photochemical processes operative during laser-simulated dissociation of organometallic complexes and subsequent reaction of the photoproducts with a surface, (2) apply studies of photo-induced processes to the deposition of semiconductors, such as Gallium Arsenide, Aluminum Arsenide, and Gallium Aluminum Arsenide, and conductors such as Gold, and (3) establish experimental conditions under which epitaxial growth of the deposited materials can be achieved.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 15, 1988
- Accession Number
- ADA191978
Entities
People
- John E. Jensen