Digital Control of the Czochralski Growth of Gallium Arsenide. System Reference Manual. Valid for Czochralski Growth Controller Software Version 2.4
Abstract
This report provides an updated and extended description (Version 2. 4) of the structure and the operation of the controller software developed for digital Czochralski Growth Control System (CGCS) for compound semiconductors. This manual outdates all previous versions. The Controller Software Reference Manual discusses the design considerations applied to digital LEC crystal growth control, gives a short overview of the growth controller computer hardware and operating system environment, describes the functions of the CGCS from an operator's point of view, and delineates the internal operations of the controller software by discussing the controller software and algorithms. Various appendices provide tables of controller software tasks, routines, and variables, file format information, and lists of system messages and error codes. Keywords: Liquid encapsulated Czochralski, Crystals.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 04, 1988
- Accession Number
- ADA191997
Entities
People
- G. H. Schwuttke
- Karl Riedling
Organizations
- Arizona State University