Development of the Field-Induced Electron Injection and Impact Ionization (F4I) Technique for Radiation Hardness Testing of MOS (Metal-Oxide-Semiconductor) Gate Insulators.
Abstract
Results are presented of an effort to develop an all-electrical means for simulating the effects of ionizing radiation on the radiation-sensitive oxide layers of metal-oxide-semiconductor (MOS) microelectronic devices. The report describes the field-induced electron injection and impact ionization (F4l) technique, its successful demonstration, and successful correlation of F4l test results with conventional radiation hardness tests using an ionizing radiation source (60Co). Also described are the development and operation of a microcomputer-controlled test system that permits semiautomatic application of the F4l test to circuit test structures. Keywords: Hardness assurance, Fowler Nordheim tunneling, Impact ionization, Hole trapping, Interface traps, Radiation effects.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1988
- Accession Number
- ADA192114
Entities
People
- Harold E. Boesch Jr.
Organizations
- Harry Diamond Laboratories