Defects in High-Mobility Semiconductor Systems.
Abstract
Work under subject contract was continued in the period 23 Oct thru 23 Dec 1987 on (a) extensive electrical examination of the Pb center on silicon surfaces; (b) preliminary electrical investigation of the new metastable gallium arsenide (GaAs) defect which competes with the EL-2 center; (c) initial EPR measurements on a high ceramic superconductor; (d) related conceptual studies and tests. (a) The photocapacitance system described in the First Interim Report was applied to an extensive study of the Pb center on oxidized silicon (SI) surfaces. This center is the most important defect in integrated circuit technology, and serves as an ideal reference for study of other less-well characterized defects.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 23, 1987
- Accession Number
- ADA192298
Entities
People
- Hermann Grimmeiss
Organizations
- Lund University