Equipment for Building and Testing Superconductive Flux Flow Electronic Devices.
Abstract
The equipment authorized by the grant is a thin film vacuum deposition system containing provisions for ion beam and magnetron sputter deposition and for ion beam etching.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 30, 1987
- Accession Number
- ADA192959
Entities
People
- James B. Beyer
- James E. Nordman
Organizations
- University of Wisconsin–Madison