Computer Simulation of Electromigration in Thin Films.
Abstract
This report summarizes progress made toward computer simulation of the electromigration process in thin films. In particular it addresses the issues of forming a meaningful film, accounting for variations in the grain boundary energy and lattice mismatch, stress relaxations or annealing of the film, and mass flux within the film with and without a constraining overlayer. It incorporates vacancy concentration depended flux, but does not include the effects of void coalescence on the current density or temperature, and thus is an early life description. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1987
- Accession Number
- ADA194526
Entities
People
- H. B. Huntington
Organizations
- Rensselaer Polytechnic Institute