Crystallinity of RF-Sputtered MoS2 Films.

Abstract

The crystallinity and morphology of thin, radio-frequency (rf)-sputtered MoS2 films deposited on 440C stainless steel substrates at both ambient (approx. 70 C) and high temperatures (245 C) were studied by scanning electron microscopy (SEM) and by x ray diffraction (Read thin film photography and 0-20 scans). Under SEM, the films exhibited a 'ridgelike' (or platelike) formation region for thicknesses between 0.18 and 1.0 micrometer MoS2. X-ray diffraction was shown to give more detailed and accurate information than electron diffraction previously used for elucidating the structure of sputtered lubricant films. Keywords: Solid lubricant films, Molybdenum disulfide, Radio frequency sputtering, Thin film stress, Lattice defects, X ray diffraction.

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Document Details

Document Type
Technical Report
Publication Date
Apr 15, 1988
Accession Number
ADA195332

Entities

People

  • Jeffrey R. Lince
  • Paul D. Fleischauer

Organizations

  • The Aerospace Corporation

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemistry
  • Crystal Lattices
  • Crystal Structure
  • Diffraction
  • Electron Microscopy
  • Films
  • Friction
  • Lubricants
  • Materials
  • Microscopy
  • Photographs
  • Scanning Electron Microscopy
  • Scattering
  • Solid Lubricants
  • Thin Films
  • X Rays
  • X-Ray Diffraction

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene