Electronic Materials and Devices Prepared by Molecular Beam Epitaxy.

Abstract

Six Perkin Elmer 430P III-V MBE Systems and a PE Si MBE with appropriate transfer tubes for a totally interconnected MBE Complex has been purchased and installation has begun. The complex is located in the Coordinated Science Laboratory in Room 200 with the majority of administrative role being played by MRL. In this complex, two III-V MBE systems and a transfer tube (13 feet long) and the associated assortment of equipment has been paid for by funds obtained from AFOSR. These growth chambers have been termed as 'Growth Reactors A & B', with the transfer tube being called' 1 Tube'. The systems are presently in CSL Room 200 which has been remodeled for this purpose and we are in the process of installing them. Epitaxial growth, Molecular beams. (mjm)

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Document Details

Document Type
Technical Report
Publication Date
Apr 27, 1988
Accession Number
ADA195694

Entities

People

  • Hadis Morkoç

Organizations

  • University of Illinois Urbana–Champaign

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Diffusion Pumps
  • Electron Spectroscopy
  • Electronic Materials
  • Epitaxial Growth
  • Gate Valves
  • High Temperature
  • Ion Pumps
  • Mass Spectra
  • Molecular Beam Epitaxy
  • Molecular Beams
  • Pumps
  • Spectra
  • Spectroscopy
  • Spectrum Analyzers
  • Valves

Readers

  • Quantum Chemistry
  • Systems Analysis and Design
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics