The Generation of Scatterometer Surface Targets with Specified Surface Statistics
Abstract
Many of the models used to study scattering from rough surfaces are based on intuitive concepts and testing of the theories is desired. The generation of physical models based on computer-generated random surfaces with predetermined statistics is investigated. Generation of statistically known surfaces will allow testing of scattering theories by studying the scattering characteristics of the surfaces as their statistics are varied in a known, predetermined manner. This study extends the investigation of generation of random surfaces previously performed for computer simulations and presents interfaces for construction of a physical model. Additionally, a surface so generated is tested to measure conformity to the desired statistics. A portion of a surface with Gaussian statistics was generated and measured and the conclusion reached is that generation of statistically predetermined rough surfaces is feasible.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1987
- Accession Number
- ADA196397
Entities
People
- James D. Rochier
Organizations
- Air Force Institute of Technology