Topical Meeting on Lasers in Material Diagnostics Held in Albuquerque, New Mexico on 11-12 February 1987. Technical Digest Series. Volume 7
Abstract
Semiconductor diode lasers remain the subject of intensive worldwide development efforts with rapid progress being made in many areas of device design and performance. In addition to their use in optical fiber systems, other applications have been identified and lasers are being fabricated to meet many different system requirements. This meeting treated all aspects of laser design, development and characterization. Laser and optical techniques are increasingly important for diagnostics of a wide variety of materials and processing technologies. Applications range from diagnostics of impurities and other defects in materials, to probes of dry-processing technologies for semiconductor device fabrication, to imaging techniques for patterning and analysis in VLSI manufacture. These techniques are being used both for analytic measurements and as tools to probe new materials and effects. This meeting brought together workers from all of these areas for the exchange of results and of new directions for research. Keywords: Diagnosis; Lasers; Optics.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 31, 1987
- Accession Number
- ADA196505
Entities
People
- Jarus W. Quinn
Organizations
- Optica