Metallo-Organic Decomposition Process for Dielectric Films.
Abstract
The metallo-organic decomposition (MOD) process is a technique for producing inorganic films without processing in vacuum or going through a powder step. The processing starts with metallo-organic compounds of the desired elements dissolved in appropriate solvents. A metallo-organic compound is one in which a metal atom is bonded to a hetero atom which in turn is bonded to an organic radical. These solutions of individual metallo-organic compounds are then mixed in the appropriate ratio to give the desired cation stoichiometry for the final film to produce a formulation, which is itself a true solution. This formulation is deposited on a substrate by any of a variety of techniques to produce a wet film, which is then heated to first remove the solvent and then to decompose the metallo-organic compounds to produce an inorganic film. (jes)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 15, 1988
- Accession Number
- ADA197483
Entities
People
- A. S. Shaikh
- G. L. Liedl
- G. M. Vest
- R. W. Vest
Organizations
- Purdue University