Proceedings of the Topical Meeting on the Microphysics of Surfaces, Beams, and Adsorbates (2nd) Held in Sante Fe, New Mexico on 16-18 February 1987

Abstract

Partial Contents: The reaction of Si(100) 2 x 1 with NO and NH3: The role of surface dangling bonds; Molecular dynamics simulation of low-energy beam deposition of silicon; Visible laser etching of refractory metals by surface modification; Modulated molecular beam studies of the surface chemistry of silicon reaction with reactive gases; Effects of Ar(+) angle of incidence on the etching of Si with Cl2 and low energy Ar(+) ions; Multiphoton induced desorption of positive ions from barium fluoride; Excited atom production by electron and ion bombardment of alkali halides; Selective area deposition of metals using low energy electron beams; Synchrotron radiation-excited chemical-vapor deposition and etching; Chemiluminescence from F and XeF2 etching reaction with silicon; An in situ infrared study on the interaction of oxygen plasmas with Si and fluorine plasmas with SiO2 surfaces; Ultraviolet-assisted growth of GaAs; Atomic layer growth of GaAs by modulated-continuous-wave laser metal-organic vapor phase epitaxy; Sum-frequency generation on dye-coated surfaces using collinear and noncollinear excitation geometries; Surface diffusion measured by laser-induced desorption: Monte Carlo simulation of effects of surface defects on diffusion; Ion and neutral atomic and cluster sputtering yields of molybdenum; Molecular beam epitaxy growth mechanisms on GaAs (100) surfaces; A study of the mechanism of metal deposition by the laser induced forward transfer process.

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Document Details

Document Type
Technical Report
Publication Date
Oct 31, 1987
Accession Number
ADA197601

Entities

People

  • D. J. Ehrlich
  • Jarus W. Quinn
  • T. J. Chuang
  • T. M. Mayer

Organizations

  • Optica

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemical Reaction Properties
  • Chemical Reactions
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Laser Beams
  • Laser Science
  • Lasers
  • Light (Electromagnetic Radiation)
  • Mass Spectrometry
  • Materials Processing
  • Materials Science
  • Optical Materials
  • Optics
  • Physics Laboratories
  • Scattering
  • Spectra

Fields of Study

  • Materials science
  • Physics

Readers

  • Optical Physics and Photonics.
  • Quantum Chemistry
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene