Research on Sputtering of Ferroelectric Thin Films

Abstract

The magnetron sputting technique has been used to grow ferroelectric thin films of tungsten bronze (T.B.) PBN:60 and SBN:75, and perovskite PLZT. Film crystallinity was found to be strongly influenced by substrate temperature, with temperatures of 500-600 C usually required. Polycrystalline films were grown on quartz, sapphire and glass substrates, whereas oriented crystalline films of PBN:60 and SBN:75 were achieved with SBN:60 substrates, which have a close lattice match. The PLZT films grown on SBN:60 substrates are grain- oriented along the (100)-orientation and have excellent surface texture. This is the first time such films have been grown on T.B. substrates. Keywords: Magnetron sputtering, Ferroelectric, Thin films, Lattice matched substrates, Electro optics.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1988
Accession Number
ADA197899

Entities

People

  • R. R. Neurgaonkar

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Ceramic Materials
  • Crystal Growth
  • Crystal Lattices
  • Crystal Structure
  • Crystals
  • Detectors
  • Epitaxial Growth
  • Materials
  • Modulators
  • Optical Modulators
  • Optical Properties
  • Optics
  • Optoelectronic Devices
  • Phase Diagrams
  • Phase Transformations
  • Piezoelectric Crystals
  • Transition Temperature

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Thin Film Deposition Science.