CrystaL Growth and Mechanical Properties of Semiconductor Alloys.
Abstract
The mechanical properties of semiconductor materials is a topic of practical and theoretical interest. The mechanical properties relate to the changes in electronic and optical properties that may accompany the processing of semiconductor materials into devices, particularly the introduction of dislocations upon thermal processing, slicing, polishing, ion implantation, and the application of films. (mjm)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 14, 1988
- Accession Number
- ADA198153
Entities
People
- D. A. Stevenson
Organizations
- Stanford University