Solid Phase Equilibria in the Pi-Ga-As and Pt-Ga-Sb Systems

Abstract

Approximate Pt-Ga-As and Pt-Ga-Sb ternary phase diagrams were determined at room temperature with the use of x-ray powder diffraction data. Pt was found to react chemically with both GaAs and GaSb to produce Pt-Ga and Pt/ group-V intermetallic compounds. Each semiconductor formed pseudo-binary systems with at least three different intermetallic compounds. The Pt/GaAs interfacial reactions observed by other investigators are discussed and explained in terms of the bulk phase diagram determined in this study. Ternary phase diagrams; Intermetallic compounds; Metal; Semiconductor junctions; X ray diffraction; Gallium arsenides.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jul 22, 1988
Accession Number
ADA198654

Entities

People

  • C. T. Tsai
  • R. Stanley Williams

Organizations

  • University of California, Los Angeles

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Chemical Kinetics
  • Chemical Reactions
  • Chemistry
  • Crystal Structure
  • Diagrams
  • Diffraction
  • Elements
  • Metal-Semiconductor Junctions
  • Metals
  • Military Research
  • Phase Diagrams
  • Semiconductor Junctions
  • Semiconductors
  • Solid Phases
  • Solid Solutions
  • Stoichiometry
  • X-Ray Diffraction

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics