Density Determination of Silver Neodecanoate, Tungsten Hexacarbonyl, and a Series of Metal Acetylacetonates and Hexafluoroacetylacetonates
Abstract
The densities of a series of metal-organic compounds potentially suitable for metal-organic chemical vapor deposition, MOCVD, formation of metal interconnection films, were determined using a gas pycnometer which measures the pressure change when a gas(helium) is allowed to expand in the presence of a solid material whose density is to be determined. Densities are reported for silver neodecanoate, tungsten hexacarbonyl, and metal acetylacetonates and hexafluoroacetylacetonates of aluminum, chromium, cobalt, copper, magnesium, nickel, palladium, platinum, rhodium, and zinc. Keywords: Thin films, Density, Silver neodecanoate, Tungsten hexacarbonyl, Metal acetylacetonates, Metal hexafluoroacetylacetonates, Acetylacetonates, Hexafluoroacetylacetonates, MOCVD of metals, Density of metal-organic compounds.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 28, 1988
- Accession Number
- ADA198745
Entities
People
- A. Reisman
- S. Poston