Surface Analysis System and Surface Roman Spectroscopy

Abstract

A multipurpose surface analysis chamber equipped with x- ray photoelectron spectroscopy, ion scattering spectroscopy, secondary ion mass spectrometry and Auger electron spectroscopy has been constructed and installed. The Leybold LHS-12 system which was partially funded from this grant, comprises both high pressure and ultrahigh vacuum sample preparation and reaction chambers, thermal evaporation and radiofrequency sputtering sources and a rapid entry load lock. This system is fully operational, meeting all specifications, and is being used in a wide variety of surface science and other applications. These include the XPS study of the decomposition of alkyl halides in support of our surface Raman spectroscopy efforts, and XPS study of the X-ray induced degradation of thin polymer films and a study of the role of peroxide ions in the mechanism of high temperature super conductivity. A multipurpose surface analysis chamber equipped with X-ray photoelectron spectroscopy, ion scattering spectroscopy, secondary ion mass spectrometry and Auger electron spectroscopy has been constructed and installed.

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Document Details

Document Type
Technical Report
Publication Date
Aug 05, 1988
Accession Number
ADA200638

Entities

People

  • Alan Campion

Organizations

  • University of Texas at Austin

Tags

Communities of Interest

  • Human Systems

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Chemical Reactions
  • Chemistry
  • Chlorides
  • Electron Spectroscopy
  • Electrons
  • High Temperature
  • Mass Spectrometry
  • Polymeric Films
  • Raman Spectroscopy
  • Scattering
  • Spectrometry
  • Spectroscopy
  • Surface Analysis
  • X Ray Photoelectron Spectroscopy
  • X Rays

Fields of Study

  • Physics

Readers

  • Software Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene