The Dissociative Adsorption of Ammonia on Si(100)
Abstract
The nature of the NH3 adsorption process on Si(100) at 120 K was studied by isotopic mixing with adsorbed atomic deuterium and thermal desorption spectroscopy. NH3 was found to dissociatively absorb onto Si(100) dimers sites at 120 K as NH2(a) and H(a). The NH2(a) species persist up to about 700 K where two reaction channels become available. The major reaction channel leads to the decomposition of NH2(a) to N(a) and H(a). The minor channel is a recombination reaction that leads to the desorption of ammonia. This recombination reaction exhibits a deuterium kinetic isotope effect.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 14, 1988
- Accession Number
- ADA201599
Entities
People
- J. T. Yates Jr.
- M. J. Dresser
- P. A. Taylor
- R. M. Wallace
- Wolfgang J. Wolfgang J. Choyke
Organizations
- University of Pittsburgh