TOF/MPI/MS (Time of Flight/Multiphoton/Mass Spectrometry) Investigation of Laser-Assisted Organometallic Deposition

Abstract

The multiphoton ionization/time-of-flight/mass spectrometry (MPI/TOF/ MS) technique described in the ONT proposal has been demonstrated and applied to three photochemical systems: a) mechanistic studies of the laser-assisted chemical vapor deposition (LCUD) of the gold from dimethyl gold hexafluoro acetyl acetonate (DMG hfac); b) LCUD of gallium from trimethyl gallium (TMG); and c) the detection of phenyl radicals from iodobenzene.

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Document Details

Document Type
Technical Report
Publication Date
Nov 30, 1988
Accession Number
ADA201953

Entities

People

  • John A. Dagata

Organizations

  • American Society for Engineering Education

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acetylenes
  • Alkynes
  • Chemical Vapor Deposition
  • Chemistry
  • Decomposition
  • Engineering
  • Hypobaric Conditions
  • Ionization
  • Laser Science
  • Lasers
  • Low Temperature
  • Mass Spectrometers
  • Mass Spectrometry
  • Measurement
  • Spectrometry
  • Surface Reactions
  • Vapor Deposition

Fields of Study

  • Chemistry

Readers

  • Forest Ecology
  • Organic Chemistry
  • Semiconductor Device Technology

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene