Microstructure of Thin Films
Abstract
The techniques of determination of refractive indices in air are presented. In Tucson, the surface plasmon resonance method is used for the study of silver layers produced by different techniques. In Marseille, the guided wave technique is used for the determination of anisotropy and indices of several dielectric materials. The problem of the uniformity of the thickness and of the index of a layer deposited on a large surface is especially analyzed in the case of the Ion Assisted deposition technique. An overview of the last results obtained in Maseille and concerning the study of the scattering is given. The theoretical development performed for the interpretation of the scattering diagram leads to information concerning the grain size of the materials. The theoretical atomistic modelling of the growth process pursued in TUcson would be a complementary tool to help in the understanding of microstructure of deposited films. A survey of the results concerning OSA titania films study obtained in Marseille is given. Keywords: Optical Surface measurements, Optical anisotropy, Optical surface scattering, Optical coatings, Thin film measurements, Optical constants, Titanium oxides, Lanthanum fluoride, ALuminum.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 15, 1988
- Accession Number
- ADA201987
Entities
People
- H. A. Macleod
Organizations
- University of Arizona