Computer-Aided Fabrication System Implementation

Abstract

The objective of this contract is to do research supporting the development of a computer-aided fabrication system that will serve the needs of the American semiconductor industry and the VLSI design community. The semiconductor industry requires computer tools to enhance yields and reduce cost. VLSI designers can benefit from the ability to specify application- specific processes to fabricate their application-specific integrated circuits. In support of these goals, specific projects are in place to design, develop, and implement a hardware/software CAF system architecture; to develop aids to specifying process flows in a modular way; to develop models for semiconductor fabrication equipment; to develop technology computer aided design (TCAD) tools for the mechanical properties of integrated structures; and to develop and implement algorithms and programs to assist in scheduling of fabrication operations.

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Document Details

Document Type
Technical Report
Publication Date
Sep 30, 1988
Accession Number
ADA202128

Entities

People

  • Dimitri A Antoniadis
  • Donald E. Troxel
  • Emanuel M. Sachs
  • Paul Penfield Jr.
  • Stanley B. Gershwin
  • Stephen D. Senturia

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Application Software
  • Computer Programming
  • Computer Science
  • Computers
  • Database Management Systems
  • Databases
  • Electrical Engineering
  • Engineering
  • Experimental Design
  • Fabrication
  • Integrated Circuits
  • Lisp Programming Language
  • Manufacturing
  • Mechanical Engineering
  • Mechanical Properties
  • Micromachining
  • Semiconductor Manufacturing

Fields of Study

  • Engineering

Readers

  • Enterprise Information Systems Architecture and Joint Command Capability Interoperability Support.
  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics