Scanning Tunneling Microscopy of Platinum Films on Mica. Evolution of Topography and Crystallinity during Film Growth

Abstract

Scanning tunneling microscopy (STM) was used to characterize the topography and crystallinity of Pt films deposited on mica by r.f. sputtering. Three stages of film growth were identified by STM for films of thickness, d, between 20 and 1500A. Images of ultrathin Pt films, d<50A, show a rippled topography with no resolve features associated with ordered crystalline growth. At intermediate coverages, 60<d<200A, 50-150A diameter crystalline grains are resolved by STM. The shape and size of these grains are nearly identical to that observed by transmission electron microscopy. Large, flat grains (diameter approx. 1000A) with a nearly atomically smooth topography are observed for films of thickness > or = 500A. STM images of Pt films immersed under water an in mineral oil, and images of'mobile' surface contaminants are also reported. Sputter deposition; Platinum films.

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Document Details

Document Type
Technical Report
Publication Date
Dec 05, 1988
Accession Number
ADA202310

Entities

People

  • D. J. Mcclure
  • Erik R. Scott
  • Henry S. White

Organizations

  • University of Minnesota

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemical Engineering
  • Chemistry
  • Crystal Structure
  • Electron Microscopy
  • Engineering
  • Films
  • Materials
  • Materials Science
  • Measurement
  • Metal Films
  • Microscopes
  • Microscopy
  • Physical Chemistry
  • Roughness
  • Thick Films
  • Thin Films
  • Transmission Electron Microscopy

Fields of Study

  • Physics

Readers

  • Coastal Oceanography
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene