Investigation of the Impedance Modulation of Thin Films with a Chemically-Sensitive Field-Effect Transistor

Abstract

This study resulted in the design and fabrication of a Chemically- Sensitive Field-Effect Transistor (CHEMFET) with an interdigitated gate electrode structure. The electrical performance of the CHEMFET, both in the time-domain and frequency domain, was evaluated for detecting changes in the molecular structure and chemical composition in three thin films: an epoxy, copper phthalocyanine (CuPc), and acetylcholinesterase (ACHE). The change in the chemical state of a film was manifested as a change in the electrical impedance of the interdigitated gate electrode structure. For the epoxy, its molecular structure changed as a result of the curing reaction. To induce a change in the chemical state of the CuPc and ACHE films they were exposed to part-per billion concentrations of a challenge gas, either nitrogen dioxide (NO2) or the the organophosphorus compound, diisopropyl methylphosphonate (DIMP). The results clearly show that the CHEMFET can detect chemical and structural changes in an epoxy and CuPc film. The sensitivity of the ACHE film was not unequivocally determined due to long term drift in the ACHE film's electrical properties. The most remarkable result of this effort was the demonstration of a unique selectivity feature in the CHEMFET's frequency dependent response to a challenge gas. The examination of the relative changes in the electrical properties of the CHEMFET at different frequencies showed that the CHEMFET can be used to distinguish between NO2 and Dimp EXPOSURE. Theses.

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Document Details

Document Type
Technical Report
Publication Date
Dec 05, 1988
Accession Number
ADA202766

Entities

People

  • John M. Wiseman

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Chemical Reactions
  • Chemistry
  • Dielectric Gases
  • Dielectric Permittivity
  • Dielectrics
  • Electrical Impedance
  • Electrical Properties
  • Field Effect Transistors
  • Material Degradation Processes
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Materials Testing
  • Measurement
  • Nitrogen Oxides
  • Organophosphorus Compounds
  • Test And Evaluation

Fields of Study

  • Materials science

Readers

  • Analytical Chemistry
  • Semiconductor Device Technology
  • Thin Film Deposition Science.