Theoretical Studies of the Chemistry and Physics of Oxygen in Silicon

Abstract

We have developed a cyclic-cluster program to compute the structure and properties of defects in crystalline solids. We have found the semi-empirical electronic structure method MINDO/3 to give the best account of the structure, stability and states near the gap for defects in silicon. We have applied the cyclic cluster program to describe the chemistry and physics of hydrogen and oxygen in a silicon crystal. We have concluded that a di-ylid is a promising candidate for the core of the 450 oxygen thermal donor in silicon. We have discovered that a four-member ring containing two oxygen atoms is likely to diffuse much faster than interstitial oxygen in silicon. We have applied perturbation theory to give a qualitative explanation of the ladder of effective mass states associated with oxygen clusters in silicon and germanium. Keywords: Semiconductor theory, Silicon defects, Oxygen thermal donors.

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Document Details

Document Type
Technical Report
Publication Date
Nov 18, 1988
Accession Number
ADA203168

Entities

People

  • James W. Corbett
  • Lawrence C. Snyder

Organizations

  • State University of New York at Albany

Tags

DTIC Thesaurus Topics

  • Chemistry
  • Contracts
  • Electron Nuclear Double Resonance
  • Electron Spin Resonance
  • Electronic Materials
  • Electronic States
  • Electronic Structure Methods
  • Elements
  • Ion Implantation
  • Materials
  • Military Research
  • New York
  • Perturbation Theory
  • Physics
  • Semiconductors
  • Spectra
  • Spin Resonance

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Quantum Chemistry

Technology Areas

  • Microelectronics