Computer-Aided Fabrication System Implementation
Abstract
The purpose of the work reported on here is to design, develop, implement, and deploy information management systems to aid in the fabrication of integrated circuits, particularly in the context of flexible manufacturing. The work includes the development of a hardware-software system, named CAFE, and the support of this program and its use in the MIT Integrated Circuits Laboratory. CAFE should support both manufacturing of ICs and the design of processes, so part of the effort is directed toward the development of a suitable process-development environment. Other projects are concerned with equipment and mechanical-property models and scheduling. Keywords: Statistical experimental design, CAF(Computer Aided Fabrication), Scheduling, Mathematical models.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 31, 1988
- Accession Number
- ADA203651
Entities
People
- Paul Penfield Jr.
Organizations
- Massachusetts Institute of Technology