Film Elastic Properties Determined by the Indentation Test-Theoretical Considerations
Abstract
The elastic solutions of axisymmetric mixed boundary value problems are considered. An elastic layer is assumed to be either in smooth contact or perfectly bonded to a semi-infinite elastic half-space. The elastic field caused by the indentation of the elastic layer by a rigid indenter is solved for spherical, conical, and flat-ended-cylindrical indenters. The results are obtained by solving a Fredholm integral equation of the second kind with a continuous symmetrical kernel that depends on the bonding conditions. Numerical results are given for several combinations of film and substrate elastic moduli and film thicknesses. These results provide a guideline for selecting appropriate film thickness and substrates to determine the elastic constants of thin films.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 12, 1989
- Accession Number
- ADA203997
Entities
People
- B. B. Rath
- H. Y. Yu
- S. C. Sanday
Organizations
- United States Naval Research Laboratory