Submicron Electronic Device Using Field-Emission Tip

Abstract

Field-emission electric devices offer several advantages over conventional semiconductor devices. However, to operate at low voltages, the cathode of the device must be constructed of small needles that cannot be satisfactorily constructed by current techniques. This research investigated masking and etching techniques, and needles were produced with diameters smaller than the smallest produced by other methods.

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Document Details

Document Type
Technical Report
Publication Date
Jan 03, 1989
Accession Number
ADA204121

Entities

People

  • William A. Gibson

Tags

DTIC Thesaurus Topics

  • Chlorides
  • Construction
  • Diameters
  • Dielectric Polymers
  • Electric Fields
  • Electron Microscopes
  • Electrons
  • Emission
  • Fermi Levels
  • Field Emission
  • Films
  • Low Voltage
  • Measurement
  • Microelectronics
  • Semiconductor Devices
  • Semiconductors
  • Voltage

Readers

  • Plasma Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics