Process Challenges in Compound Semiconductors.

Abstract

Compound semiconductors, such as GaAs, InP, and HgCdTe, are essential components in future photonics and microelectronics technologies. If the United States is to be competitive in these technologies, attention must be directed to the reproducible and affordable processing of these materials. This report assesses the current status of compound semiconductor processing technology and identifies factors that limit the ability to fabricate advanced electronic and optoelectronic devices. Emphasis is placed on current and near-term devices, but the process technologies discussed are generic to future components and systems based on these materials. Keywords: Compound semiconductors, Galium arsenide, Mercury cadmium telluride, Indium phosphide, Semiconductor processing, Device fabrication, Process technologies, Process modelling, Substrates, Transistor structures, Interconnections, Crystal growth, Epitaxial structures, Epitaxial growth, Etching, Lithography, Ion implantation, Dielectrics, Process diagnostics, Process environment.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1988
Accession Number
ADA204868

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Compounds
  • Chemical Engineering
  • Chemistry
  • Electronics Industry
  • Electronics Laboratories
  • Field Effect Transistors
  • High Electron Mobility Transistors
  • Material Degradation Processes
  • Materials Processing
  • Materials Science
  • Materials Testing
  • Modules (Electronics)
  • Physics Laboratories
  • Power Electronics
  • Semiconductor Manufacturing
  • Semiconductors
  • Solid State Physics

Fields of Study

  • Materials science

Readers

  • Defense Technology Research and Development.
  • Integrated Circuit Design and Technology.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics