Proton Backscattering in Bulk Silicon at Large Angles of Incidence.

Abstract

This report describes proton backscatter studies performed at the Tandem Van de Graaff Accelerator Facility. The objective was to determine if backscattering protons were sufficient to alter the radiation induced proton damage in silicon electronics when high energy protons (6 MeV and below) bombarded bulk silicon at large angles of incidence (>65 deg). The overall results showed that when the angles of incidence of bombarding protons (on bulk silicon) approached 80 deg, and their energies were lowered to about 100 KeV the number of backscattering protons approached 12 percent of the bombarding number. At this point (and at lower energies), the effect of the backscattering protons would become significant and they would have to be taken into account when determining the radiation induced proton damage in silicon electronics. The number of backscattering protons, their energies, and their angles of reflections (for silicon and other solids) can accurately be determined from a computer program called TRIM (Transport of Ions in Matter). Keywords: Proton backscattering, Channeling, Bulk silicon, Radiation effects, Test methods. (JHD)

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1988
Accession Number
ADA204881

Entities

People

  • A. H. Hoffland
  • R. W. Tallon
  • T. R. Locker
  • W. T. Kemp

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Air Force
  • Angle Of Incidence
  • Backscattering
  • Charged Particles
  • Classification
  • Computer Programs
  • Computers
  • Electronics
  • Energy
  • Guard Rings
  • High Energy
  • Ionizing Radiation
  • Ions
  • Measurement
  • Radiation
  • Reflection
  • Scattering

Fields of Study

  • Physics

Readers

  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Solar Physics
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene