Cluster Beam Deposition Technology for Optical Coatings. Phase 1
Abstract
An investigation of cluster beam sources for thin-film coating was carried out. Nozzled crucibles of the type used for Ionized Cluster Beam (ICB) deposition were studied to elucidate the make-up of such beams and the mechanisms of cluster formation in them. Work elsewhere has given evidence of 1000-atom clusters and attributed them to homogeneous nucleation in the expanding vapor beam. Homogeneous nucleation theory was used in a computer simulation to calculate cluster nucleation and growth rates. High rates of nucleation were predicted; however, condensation heating of the embryos restricted their final size to a few tens of atoms. It was concluded that large clusters cannot be produced by homogeneous mechanisms alone. Thin films, Cluster beam, Optical coating.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1987
- Accession Number
- ADA204981
Entities
People
- A. C. Day
- G. S. Knoke
- J. Andrzej Domaradzki