Study of Quantum Mechanical Effects in Deep Submicron, Grating-Gate Field Effect Transistors
Abstract
This research program investigates the effect of extreme submicron spatial modulation of the electrostatic potential on the transport of 2-D electrons in silicon and in III-V heterojunction semiconductor devices. The test vehicle is the so-called periodic gate FET (PGFET), with gates consisting of either a grating or a grid, with 200 nm periodicity. When electrons are made to move in a direction perpendicular to the potential modulation, i.e., perpendicular to the grating or (along the grid axis), they exhibit a surface superlattice (SSL) effect. When moving along the potential modulation electrons are restricted to only one degree of freedom and thus constitute a quasi-one-dimensional (Q1D) system . Grid-gate FET's have been found to exhibit substantially stronger SSL behavior than their grating-gate counterparts. Finally, electron transport in quantized and spatially periodic systems has been studied theoretically and new insights and quantitative calculations have been obtained.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 06, 1989
- Accession Number
- ADA205140
Entities
People
- Dimitri A Antoniadis
- Henry I. Smith
Organizations
- Massachusetts Institute of Technology