Three-Dimensional Modelling for Contact Resistance of Current Flow into a Source/Drain Region

Abstract

Various extensions of the transmission line model are introduced to find the resistance for current flow in MOSFET source/drain regions. The geometry is taken to be a rectangular box with a rectangular contact on the upper surface. Explicit formula are derived by assuming that the current flow is restricted to various geometrical planes. Comparison of basic results with simulation and experimental data is good. Comparison with simulation results for misalignment is less good.

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Document Details

Document Type
Technical Report
Publication Date
May 31, 1988
Accession Number
ADA206694

Entities

People

  • Ellis Cumberbatch
  • Weifu Fang

Organizations

  • Claremont Graduate University

Tags

Communities of Interest

  • Air Platforms

DTIC Thesaurus Topics

  • Air Force
  • Asymptotic Series
  • Boundary Value Problems
  • Differential Equations
  • Equations
  • Geometry
  • Jet Propulsion
  • Mathematics
  • Misalignment
  • Partial Differential Equations
  • Resistance
  • Simulations
  • Sizes (Dimensions)
  • Three Dimensional
  • Transmission Lines
  • Two Dimensional

Readers

  • Fluid Dynamics.
  • Pulsed Power and Plasma Physics.
  • Semiconductor Device Technology