Ultrasmall Holographic X-Ray Gratings Using Synchrotron Radiation and X-Ray Lithographic Techniques.
Abstract
In a series of experiments use was made of radiation generated by the undulator magnet, recently installed on ALLADIN at the Synchrotron Radiation Center. Since the properties of that radiation were not previously known, the first step consisted of characterizing the radiation not only spectrally, but also in angular intensity space. The angular characterization was accomplished by allowing the radiation to paa through a pinhole before reaching a gold photodiode. The photodiode measurements served to ascertain the beam profiles along both the horizontal and vertical directions. In terms of the first harmonic frequency, v(1), the first harmonic photon energy, e(1), can be written as hv(1). At hv(1)=50 eV, the measurements confirmed expectations and demonstrated a Gaussian distribution along both axes. Two sets of measurement were performed: one with, the other without interposition of an aluminum filter 800 A(o) thick. Keywords: Grating; Lithography; Undulator. (JHD)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1988
- Accession Number
- ADA206731
Entities
People
- Paul L. Csonka
- Roman O. Tatchyn
Organizations
- University of Oregon