Studies on Ions and Neutrals Desorbed from Solid Surfaces by Ion and Electron Bombardment
Abstract
This project was aimed toward increasing our fundamental knowledge of the details of the interaction of energetic particles with solid surfaces. These studies included the measurement of the angular and energy contributions of the yield of desorbed ions by secondary ion mass spectrometry (SIMS). In addition, we developed a novel angle and energy resolved detector capable of measuring for the first time the yield of neutral particles desorbed from monolayers. This detector utilized multi-photon resonance ionization of the ejected atoms which occur at efficiencies approaching 100%. The results of the experimental measurements were coupled to classical dynamics calculations of the ion impact event. This approach has been pursued to utilize ion beams to examine the structure of surface layers through anisotropies observed in the angular distributions. A variety of materials including alloys, semi-conductors and organic monolayers on metals were candidates as model system. The experiments have opened new avenues for using ion beam methods for the trace analysis of important electronic materials at unprecedented sensitivity limited.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 24, 1989
- Accession Number
- ADA206734
Entities
People
- Nicholas Winograd
Organizations
- Pennsylvania State University